低电压高通量MEMS数字微流控芯片基础理论及关键技术研究-仪器仪表工程专业论文.docxVIP

万方数据 万方数据 中文摘要 以微型全分析芯片系统为基础发展起来的“芯片实验室”技术是微型分析仪 器发展的重要方向，基于电润湿技术的数字微流控芯片，以其灵活、快速、微量、 结构兼容好、易于自动化控制等优点，正以强劲的势头推动着片上实验室技术的 不断发展。特别是在生化应用领域的集成数字微流控芯片，已发展成为芯片技术 中一个引人瞩目的新兴研究领域。 本硕士论文针对电润湿技术为核心的数字微流控芯片操作微流体存在的驱 动电压较高、液滴操作动力学饱和、驱动模块与传感检测系统单片一体化等问题， 提出了实现低电压、高稳定性和高通量的器件设计方案，并通过实验验证了方案 的可行性；探索建立了电润湿动态饱和模型；探索了与数字微流控芯片集成的传 感技术与加工工艺方法，实现了芯片的驱动模块与传感单元的集成。 本文工作主要如下： （1）本文在查阅大量文献、资料和总结前期研究工作的基础上，系统地总 结了数字微流控芯片的设计要点与评价方法，提出了电压、高通量的芯片设计方 案； （2）利用 MEMS 加工技术完成了芯片加工，并通过微流控操作实验验证了 芯片低电压和高通量的特点，并且实现了芯片的稳定性与数字性的改进； （3）针对电润湿领域的饱和现象，提出了动态饱和模型，深入讨论了数字 微流控芯片的动态性能以及参数优化。 （4）探索了芯片一体化工艺，设计并实现了高通量集成芯片的加工工艺。 本论文的工作得到了国家自然科学基金的资助 关键词：数字微流控芯片，电润湿技术，MEMS，芯片集成 ABSTRACT Recently, Lab-on-a-chip technology has become one of most important field of miniaturized analytical instruments on the basis of the development of miniaturized total analytical system. Capable of manipulating droplets of volume from microliter to picoliter in a flexible and speed way, electrowetting based digital microfluidics technologies have been widely explored for biological and chemical detections to archive the “Lab-on-a-chip” targets. However, some difficulties still remain in eletrowetting based digital microfluidics, such as high driving voltage, dynamic saturation and lack of devices for high-throughput analysis, and so on. This magisterial thesis develops a low voltage, high-throughput electrowetting based actuator design. Theoretical analysis and experiments have carried out to demonstrate the device, including low voltage, improved digital dynamics, and capability for high-throughput analysis. The relationship between dynamic saturation and device physics is talked about based a novel dynamic model developed here. Furthermore, electrowetting based digital microfluidic chip integrating with piezoelectric MEMS sensor is demonstrated. The main investigations in this thesis are as the following. On the basis of a large reference and previous work, the design and evaluation methods of digital microfluidic chip have been prop