压电作动器迟滞非线性建模与补偿控制研究-机械电子工程专业论文.docx

结构的力传感灵敏度进行了标定。进一步地，通过有限元分析和实验验证，揭示了压电智能结构内部存在的串扰现象。根据压电智能结构的物理模型以及对其串扰现象的分析结果，建立了传感―作动一体式压电智能精密运动平台的动力学模型，并测试了该压电智能精密运动平台对其输出位移进行有效监测的能力。为有效补偿率相关迟滞非线性对所设计的传感―作动一体式压电智能精密运动平台的影响，设计了非线性自适应逆控制器。实验结果表明，所设计的传感―作动一体式压电智能精密运动平台能够在无外加传感器的情况下，对不同频率的参考信号进行运动跟踪。关键词：微/纳定位平台压电作动器迟滞非线性建模非线性控制AbstractAlongwiththefastdevelopmentofultra-precisionmotionsystems,modelandcon-trolofpiezoelectricactuatorsdrawsignificantresearchinterest.Unfortunately,oneofthemainobstacleshinderingtheirapplicationsisthehysteresis,whichisnotignorableinap-plicationsthatrequireahighaccuracyinmotioncontrol.Toaddresssuchchallenges,thisdissertationpresentsacomprehensivemodeling,controller designandexperimentalevalu-ationforpiezoelectricactuatorswithcomplexhysteresisnonlinearity. Withtheemergingapplicationsofpiezoelectricmaterialbasedactuatedsystem,theresultsofthedissertationwillenrichthetheoryandmethodologyofhysteresiscompensationandcontrol,andadvancethestateofnanomanufacturinginboththeoreticandpracticalaspects.Themainresearchcontentsandachievementsarelistedasfollows.AmodifiedasymmetricBouc-Wenmodelisproposedformodelingthenonlinearhys-teresisbehaviorinpiezoelectricactuator.Byemployingparticleswarmoptimization(PSO)approach,allparametersoftheproposedmodelareidentifiedsimultaneouslywithhighpre-cisionandhighefficiency.ThevalidityoftheproposedmodelisexperimentallytestifiedincomparisonwiththeclassicalBouc-Wenmodeltodemonstrateitseffectivenessonthehys-teresisprediction.Forthecontrollerdesign,anewapproachbasedonPSOforlinearizingthehystereticnonlineartermispresented.Onthebasisoftheproposedmodel,anH∞fullorderoutputfeedbackrobustcontrollerutilizingalmostdisturbancedecouplingisdevelope-d.Experimentsshownthatthedevelopedcontrollercancancelthenonlinearhysteresisinpiezoelectricactuatoreffectively.Consideringrate-dependentpropertyofpiezoelectricactuator,thisdissertationfurtherproposesanasymmetricrate-dependentBouc-Wenmodel.Inordertoavoidlaboriousmath-ematicalprocedureforconstructinganinversionofthehysteresismodel,anewdigitalin