爱德华scrubber高处理量.pptVIP

The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. ? Edwards Limited 2007 ATLAS Product range overview ATLAS range Combustion abatement combined with wet scrubbing stages Suitable for Etch applications Low CoO, user friendly solution Excellent reliability on harshest processes PFC gas abatement capability ATLAS Construction ATLAS Layout Gas path ATLAS Combustion section Inlets L-shaped pipe work Avoid blockage by solid/liquid by-products Up to 6 inlets TMS option available Inlet temperature control Avoid by-products condensation Combustion section Initial gas treatment: combustion Oxidation of deposition gases SiH4 + O2 ? SiO2 + 2H2O Reduction of clean gases (NF3, F2) 2F2 + CH4 + O2 ? 4HF + CO2 Anti-clogging inlet head Inward fired combustor Porous ceramic construction Excellent corrosion resistance Proven powder handling Safe (leak-proof, cold outer wall) Inlet Head Self Cleaning Mechanism Combustor Combustor: Inward fired combustion Benefits 1: Uniform temperature Flame-less combustion Combustion at the wall Heat radiation to the center Low temperature ~ 800oC Low NOx emissions (10ppm) Uniform Temperature No hot spot, No cold spot Combustor length of 300mm = Long residence time in a hot environment at 800°C High DRE Benefit 2: Powder handling - No blockages Benefit 3: No corrosion Only ceramic material in contact with hot gases No corrosion Greater safety Greater uptime Benefit 4: Safety Outer wall of burner is cold (~ 40oC) Safe to touch, no burn injury O-rings are used in cold area only No metal part in contact with hot gas Viton can resist HF and HCl below 200oC Burner is leak-proof, Burner stay leak-proof No risk of hot gas leakage ATLAS Wet scrubbing section Wet scrubbing section C-PVC construction Flame retardant plastic Corrosion-resistant High efficiency scrubbing performance Water soluble by-products (HF, HCl…etc.) Insoluble particles (SiO2) Wet scrubbi