多晶硅的冷氢化工艺.docxVIP

多晶硅的冷氢化工艺佳 1，曹祖宾 2*,韩冬云 2，李会鹏 2，石薇薇 2，李大为 2宋（1.辽宁石油化工大学 材料与化学学院，辽宁 抚顺 113001；2. 辽宁石油化工大学 石油化工学院，辽宁 抚顺 113001）摘要：对多晶硅的冷氢化闭合生产线进行了探讨，总结出一条低能耗、高产量的闭合循环生产线。主要包括如下几道工序:冷氢化，精馏，还原，还原尾气回收，歧化等。冷氢化工序进行冷氢化反应，主要包括固定床反应器、沉降器以及气提塔等设备。来 自于气提塔的氯硅烷液体通过四级精馏塔进行分离，最后得到精制三氯氢硅。精制三氯氢硅进入还原系统生产多晶硅。还原工 序尾气经过两级精馏塔进行分离。回收的二氯二氢硅与四氯化硅经过提纯后进入歧化系统，反应制得三氯氢硅。如此几套工序 循环进行可以实现多晶硅的闭环生产，做到系统内部的氯化氢、氯硅烷等系统消化,对环境的污染降到最低。关键词：多晶硅；冷氢化；闭合生产线中图分类号：TQ 324.21文献标识码：B文章编号：1001- 0017（2011）06- 0076- 04Polysilicon’s Cold Conversion Process on Fixed BedSONG Jia1, CAO Zu-bin2, HAN Dong-yun2, LI Hui-peng2, SHI Wei-wei2 and LI Da-wei2(1. College of Materials and Chemistry , Liaoning University of Petroleum Chemical Technology, Fushun 113001, China;2. College of Petrochemical Technology, Liaoning University of Petroleum Chemical Technology, Fushun 113001, China）Abstract: The polysilicon’s cold conversion closed-loop production line is discussed. And a low energy consumption, high yield production line is obtained. This line mainly includes: cold conversion, distillation, CVD, recycling of CVD off-gas, disproportionation, etc. Equipments of cold con － version include fixed-bed reactor, settler and stripper. The chlorosilane liquid which comes from stripper is separated by 4-level distillation tower to get purified trichlorosilane. The purified trichlorosilane which comes from distillation system will go into chemical vapor deposition system to produce polysilicon. The off-gas coming from chemical vapor deposition is separated by 2-level distillation tower. The recycled dichlorosilane and silicon te － trachloride which is purified will go into disproportionation system to synthesize trichlorosilane. These systems described above are assembled to real － ize closed-loop production, and it achieves the hydrogen chloride and chlorosilane which comes from the whole system can be digested itself, so as to make the pollution to the environmental be minimum.Key words: Polysilicon; cold conversion; closed pr