[文学研究]No3-Vacuum Technology-gauge-学生.pdf

A vacuum system Vacuum System Components Vacuum Pumps （真空泵） Vacuum Gauges （真空规） Valves （阀门） Vacuum Chambers （真空腔体） Feedthroughs （输入输出） 1 IG: Ionization gauge (电离规） TC: Thermolcouple gauge (热偶规） 2 真空的测量 Vacuum Gauges （真空规,真空计） Pressure measurement /topic/pressure-measurement-1 3 4 5 • Experiments and processes are performed every day in vacuum vessels that have total pressures ranging from 10-13 Torr to almost atmospheric pressure (760 Torr). This pressure range extends almost 16 decades! • No one pressure gauge available can accurately measure the pressure across this enormous range. /devzone/cda/tut/p/id/3816 6 Subatmospheric Total Pressure Gauges Gauges are grouped into the following four categories: • Gauges that measure the physical force exerted on a surface; （直接式） • Gauges that measure momentum transfer by gas molecules; （间接式） • Gauges that measure heat transfer; （间接式） • Gauges that measure gas density by ionization of gas molecules. （间接式） 7 8 热阴极电离规 热偶规 冷阴极电离规 9 Vacuum Concepts 10