检视开启国立成功大学机构典藏.PDFVIP

奈量 奈精行精 精度 奈 力精 滑 (stick slip)精度 理 精行 量 力降滑 率 奈精利 來 精X-Y-Z XY Z 精奈 精度 精精 I Abstract Today, Many process technique and carried devices for machine tools and measurement instruments must rely on the technology of the micro/nanometer drive and positioning. So, it is extremely anxious to develop the actuator, which has the characteristic of large stroke and high precision motion. In case of positioning in micro/nanometer accuracy, the largest hindrance is the friction problem. It causes a stick-slip motion in a servomechanism and affects convergence performance near the reference position, decreasing the positioning accuracy. Thus, a servo pneumatic 3-axis driven table will be built on the basis of the frictionless drive concept in this study. This table employs air-bearing supports for all movable portions such as slide and pneumatic actuator. First, a precise air-bearing pneumatic cylinder is designed. The piston of the pneumatic cylinder is mounted with externally pressurized air bearing. An air film separates the slider and the guide, attaining a non-contact drive. The pneumatic cylinder with air bearings has the advantage of frictionless and high-speed response, and the precision position control of the pneumatic cylinder will be achieved by using intelligent contro