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design considerations for a micromachined proportional control valve微型机械比例控制阀的设计考虑
Micromachines 2012, 3, 396-412; doi:10.3390/mi3020396 OPEN ACCESS micromachines ISSN 2072-666X /journal/micromachines Article Design Considerations for a Micromachined Proportional Control Valve Maarten S. Groen 1,*, Dannis M. Brouwer 2,3, Remco J. Wiegerink 1 and Joost C. Lötters 1,4 1 MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands; E-Mails: r.j.wiegerink@utwente.nl (R.J.W.); j.c.lotters@ewi.utwente.nl (J.C.L.) 2 Mechanical Automation and Mechatronics, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands; E-Mail: d.m.brouwer@utwente.nl 3 DEMCON Advanced Mechatronics, Zutphenstraat 25, 7575EJ Oldenzaal, The Netherlands 4 Bronkhorst High-Tech B.V., Nijverheidsstraat 1A, 7261AK Ruurlo, The Netherlands * Author to whom correspondence should be addressed; E-Mail: M.S.Groen@utwente.nl; Tel.: +31-53-489-4373. Received: 6 February 2012; in revised form: 6 April 2012 / Accepted: 24 April 2012 / Published: 27 April 2012 Abstract: Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect t
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