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synthesis of the system modeling and signal detecting circuit of a novel vacuum microelectronic accelerometer合成系统的建模和信号检测电路的一种新型真空微电子加速度计
Sensors 2009, 9, 4104-4118; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer Dongling Li 1,2,3,*, Zhiyu Wen 1,2,3, Zhongquan Wen 1,2,3, Xuefeng He 1,2,3, Yinchuan Yang 1,2,3 and Zhengguo Shang 1,2,3 1 Key National Lab of Novel Micro/Nano Devices and System Technology, Chongqing 400030, China 2 National Center for International Research of Micro/Nano System and New Materials Technologies, Chongqing 400030, China 3 Microsystem Research Center, and College of Optoelectronic Engineering Chongqing University, Chongqing 400030, China E-mails: wzy@ (Z.W.); wen_zq@163.com (Z.W.); phinex119@126.com (Y.Y.); shangzhengguos@163.com (Z.S.) * Author to whom correspondence should be addressed; E-mail: lidongling1982@163.com; Tel.: +86- Fax: +023-6510-4131 Received: 5 May 2009; in revised form: 15 May 2009 / Accepted: 22 May 2009/ Published: 27 May 2009 Abstract: A novel high-precision vacuum microelectronic accelerometer has been successfully fabricated and tested in our laboratory. This accelerometer has unique advantages of high sensitivity, fast response, and anti-radiation stability. It is a prototype intended for navigation applications and is required to feature micro-g resolution. This paper briefly describes the structure and working principle of our vacuum microelectronic accelerome
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