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su-8 cantilevers for biochemical sensing; fabrication, characterisation and development of novel read-out methods为生化传感su-8悬臂梁;.pdf

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su-8 cantilevers for biochemical sensing; fabrication, characterisation and development of novel read-out methods为生化传感su-8悬臂梁;

Sensors 2008, 8, 1595-1612 sensors ISSN 1424-8220 © 2008 by MDPI /sensors Review SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods Maria Nordström 1,*, Stephan Keller 1, Michael Lillemose 1, Alicia Johansson 2, Søren Dohn 1, 3 1 1 1 Daniel Haefliger , Gabriela Blagoi , Mogens Havsteen-Jakobsen and Anja Boisen 1 MIC – Department of Micro and Nanotechnology, Technical University of Denmark, DTU building 345 East, DK-2800 Kongens Lyngby, Denmark 2 Now at PhotoSolar ApS, Denmark 3 Now at HARTING Mitronics AG, Switzerland * Author to whom correspondence should be addressed; E-mail: man@mic.dtu.dk Received: 2 November 2007 / Accepted: 3 March 2008 / Published: 10 March 2008 Abstract: Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and low Young’s modulus. We show examples of different integrated read-out methods and their characterisation. We also show that SU-8 cantilevers have a reduced sensitivity to changes in the environmental temperature and pH of the buffer solution. Moreover, we show that the SU-8 cantilever surface can be functionalised directly with recept