一种单片集成电容式压力传感器的设计_制造和测试_黄晓东.pdfVIP

第 2 1 卷 　第 4 期 传 感 技 术 学 报 Vol . 2 1 　N o . 4 2008 年 4 月 CHIN ES E J OU RNAL O F S EN SORS AND AC TUA TORS Ap r . 2008 Design , Fabrication and Test of a Monol ithic Capacitive Pressure Sensor H UA N G X i aod ong , WA N G B i n , QI N M i ng , H UA N G Qi ngan ( ) Key L aboratory of M EM S of M i nis t ry of E d ucat ion , N anj i ng 2 10096 , Chi na Abstract :a novel cap acitive p ressure sensor is p resented. Under p ressure applied , t he capacitance changes due to t he variation of t he p ermittivity as well as t he variation of t he area , displacement between the electrodes. The in terface circuit s based on t he p rinciple of t he conver sion from capacitance to frequency are al so introduced. The fab rication of t he sensor is simple , and integrated wit h CMOS interface circuit s. The sensor was fabricated by stand ard CMOS p rocess plu s some po stp rocessing. The result s show t hat t he sensitivity is about 44 f F/ hPa from the range of 800 hPa to 1 100 hPa , and t he resolution of t he circuit is 3. 77 Hz/ h Pa. Key words :monolit hic ;cap acitive p re ssure sen sor ;int erf ace circuit EEACC :7230 ;7320 V 一种单片集成电容式压力传感器的设计 、制造和测试 黄晓东 ,王 　斌 ,秦 　明 ,黄庆安 (东南大学 M EM S 教育部重点实验室 ,南京 2 10096) 摘 　要 :提出了一种新型电容式压力传感器 。在外加压力下 ,该传感器的极板面积 、间距以及介质层介电常数均发生改变 , 并导致电容发生变化 。同时介绍了接口电路的设计 ,该电路基于电容 - 频率转换原理 。该传感器结构简单 ,实现了与 CMO S 接口电路集成 。传感器采用标准 CMO S 工艺与后处理工艺相结合的方式制造 。结果表明 ,在 800 h Pa 到 1 100 h Pa 的压力范 围 ,传感器灵敏度约为 44 f F/ h Pa ,接口电路的分辨率为 3 . 77 Hz