SMC Pneumatic Clean Room Equipment（SMC气动洁净室设备）.pdfVIP

SMC Pneumatic Clean Room Equipment Clean Series Series 10-/11-/12-/13-Series 10-/11-/12-/13- Suitable for clean environment. Prevents particle generation in clean room. Applicable equipment Actuators (Cylinders, Rotary actuators, Air grippers), Directional control equipment, Flow control equipment, Filters, Pressure control equipment, Fittings/Tubing, Air preparation equipment, Pressure switches Note) The 11-, 12-, and 13- series are only applicable to actuators. Special Clean Series Adheres to an even higher standard of cleanliness than the Clean Series. The development of this line of products, from structure and materials to assembly environment, are all determined for clean environment use. Applicable equipment Clean rodless cylinders, Clean regulators, Clean One-touch fittings, Clean tubing, Clean gas filters, Clean air filters Copper, Fluorine, Silicone-free, Low-particle Generation Series 21-/22-Series 21-/22- Suitable for environments where the presence of copper, fluorine or silicone materials is restricted. Structures are identical to the Clean Series. (Grease and packaging are different from the Clean Series.) Applicable equipment Actuators (Cylinders, Rotary actuators, Air grippers), Directional control valves, Flow control equipment, Pressure control equipment, Fittings Note) The 22- series is only applicable to actuators. 1 Dust is kept from the clean room. •After inspection, the product is blown with high purity air (of ISO Class 5 equivalent clean bench) in a clean environment. •Products are sealed and shipped in antistatic double bags. 10-/11-/12-/13- (Clean Series) Product assembled in clean room (Special Clean Series) Assembly and inspection in a standard workshop Clean booth ISO Class 5 Pa