Silicon as a Mechanical Material Berkeley AI （硅作为机械材料伯克利AI）.PDFVIP

420 PROCEEDINGS OF THE IEEE, VOL. 70, NO. 5, MAY 1982 Silicon as a Mechanical Material KURT E. PETERSEN, MEMBER, IEEE Abstract-Single-crystal silicon is being increasingly employed in a miniaturized mechanical devices and components must be variety of new commercial products not because of its well-established integrated or interfaced with electronics such as the examples electronic properties, but rather because of its excellent mechanical given above. properties. In addition, recent trends in the engineering literature indi- cate a growing interest in the use of silicon as a mechanical material The continuing development of silicon micromechanical with the ultimate goal of developing a broad range of inexpensive, applications is only one aspect of the current technical drive batch-fabricated, high-performance sensors and transducers which are toward miniaturization which is being pursued over a wide easily interfaced with the rapidly proliferating microprocessor. This front in many diverse engineering disciplines. Certainly silicon review describes the advantages of employing silicon as a mechanical microelectronics continues to be the most obvious success in material, the relevant mechanical characteristics of silicon, and the pro- cessing techniques which are specific to micromechanical structures.