SEMATECH Design Guidelines for Gas Box （SEMATECH气盒的设计指导方针）.pdfVIP

SEMATECH Design Guidelines for Gas Box Components SEMATECH Technology Transfer-ENG SEMATECH and the SEMATECH logo are registered service marks of SEMATECH, Inc. Product names used in this publication are for identification purposes only and may be trademarks of their respective companies. © 1996 SEMATECH, Inc. SEMATECH Design Guidelines for Gas Box Components Technology Transfer #-ENG SEMATECH June 28, 1996 Abstract: This document is designed as a manufacturer’s guideline for standardizing components for gas boxes, which represent a substantial part of the cost of process tools used in semiconductor manufacturing. The document provides specifications for electrical and mechanical characteristics for the most common components of a typical gas box: valves, mass flow controllers (MFCs) and mass flow meters (MFMs), regulators, filters and purifiers, and pressure transducers. The information in this guide is intended to benefit SEMATECH member companies in working with suppliers toward meeting the goal of reducing fluid and gas systems cost of ownership (COO) by 20% in future fabrication facilities. The guidelines are represented in drawings and tables. This document is in development as an industry standard by Semiconductor Equipment and Ma