STC89C54单片机PSD的光点移动量测量系统的研究.docVIP

STC89C54单片机PSD的光点移动量测量系统的研究 摘要移相干涉术（PSI）是一种高精度、高灵敏度、高空间分辨力的非接触式光学测量方法，已经广泛地应用于一些与光程差参数相关的物理量的测量。但也正因为高精度和高灵敏度的原因，它易受环境振动的影响。环境振动是移相干涉仪测量误差的主要来源之一。本论文着重介绍了移相干涉仪抗振技术的研究进展及存在问题，并在深入了解干涉原理及干涉图的基础上，选用光电位置传感器（PSD）作为光电探测器件，探测干涉条纹的抖动量。系统由PSD、电流-电压变换电路、运算放大电路及单片机组成。系统根据干涉条纹在PSD光敏面上的位置变化，输出不同的电流，经单片机处理可以显示条纹移动量和方向，从而给后续的振动补偿提供有用的数据。这里，选用51S单片机开发板，用的单片机芯片是STC89C54。经过测试，系统适用于100Hz以下的振动。 关键词移相干涉抗振PSD单片机STC89C54 毕业设计说明书（论文）外文摘要6431 TitleThe development of measurement system of lightspots jitter based on PSD Abstract Phase-shifting interferometry (PSI), as a high-precision,high-sensitivity,high-spatial resolution non-contact optical measurement method, has been widely used in physical measurement with the optical path difference parameters.But also because of the high- precision and high-sensitivity reasons,it is vulnerable to the impact of environmental vibration,ambient vibration is a major source of phase-shifting interferometer measurement error.This paper focuses on the phase-shifting interferometer vibration technology progress and problems.And in-depth understanding of the interference principle and the interference pattern on the basis of the choice of the optical position sensor(PSD) as a photodetector,to detect the interference fringes jitter. By the PSD, the current - voltage conversion circuit, operational amplifier circuits and single chip. The system output different current based on interference fringes in the PSD photosensitive surface of the position change. The fringe shift amount and direction of the single-chip processing, in order to provide useful data to the subsequent vibration compensation.Here,I select 51S microcontroller development board,with the SCM chip,is STC89C54.After testing,the system for vibration below 100Hz. 3.3.1PSD光电位置探测器原理11 3.3.2基于PSD的干涉条纹移动量检测方法12 4实验系统设计14 4.1条纹检测电路设计14 4.1.1PSD光电探测器14 4.1.2I/V转换放大电路15 4.1.3低通滤波电路16 4.1.4加减法电路17 4.1.5判向电路17 4.1.6位移测量电路18 4.2单片机编程显示电路20 5实验结果及分析23 5.1PSD位置传感器测量23 5.2滤波电路特性分析23 5.3放大电路频率响应25 5.4单片