Hybrid HIPIMS and DC magnetron sputtering （混合HIPIMS和直流磁控溅射）.pdfVIP

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Hybrid HIPIMS and DC magnetron sputtering （混合HIPIMS和直流磁控溅射）.pdf

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Hybrid HIPIMS and DC magnetron sputtering （混合HIPIMS和直流磁控溅射）

Hybrid HIPIMS and DC magnetron sputtering deposition of TiN coatings: Deposition rate, structure and tribological properties LUO, Quanshun /0000-0003-4102-2129, YANG, S. and COOKE, K.E. Available from Sheffield Hallam University Research Archive (SHURA) at: http://shura.shu.ac.uk/7818/ This document is the author deposited version. You are advised to consult the publishers version if you wish to cite from it. Published version LUO, Quanshun, YANG, S. and COOKE, K.E. (2013). Hybrid HIPIMS and DC magnetron sputtering deposition of TiN coatings: Deposition rate, structure and tribological properties. Surface and Coatings Technology, 236, 13-21. Repository use policy Copyright © and Moral Rights for the papers on this site are retained by the individual authors and/or other copyright owners. Users may download and/or print one copy of any article(s) in SHURA to facilitate their private study or for non- commercial research. You may not engage in further distribution of the material or use it for any profit-making activities or any commercial gain. Sheffield Hallam University Research Archive http://shura.shu.ac.uk Please cite this article as: Q. Luo, et al., Surf. Coat. Technol. 236,2013, 13-21. /10.1016/j.surfcoat.2013.07.003 P a g e | 1 Hybrid HIPIMS and DC magnetron sputtering deposition of TiN coatings: deposition rate, structure and tribological properties 1 2 2 Q. Luo , S. Yang , K. E. Cooke 1Materials and Engineering Research Institute, Sheffield Hallam University, Howard Street, Sheffield, S1 1WB, UK 2Teer Coatings Ltd., Miba Coating Group, West Stone House, West Stone, Berry Hill Industrial Estate, Droitwich, Worcestershire WR9 9AS, UK Abstract: