计算祝安定,刘宇翔,汪飞,黄文浩.pdf

Vol.32,No.3 Opto-Electronic Engineering March,2005 1003501X(2005 230026 MEMS TEM00 10mW 7.4×10-17 N⋅m TH703.8A Calculation for optical drive of micro-propeller-shaped rotor ZHU An-ding, LIU Yu-xiang, WANG Fei, HUANG Wen-hao (Department of Precision Machinery and Instrumentation, University of Science and Technology of China, Hefei 230026, China) Abstract Driving micro-device with optical force is a novel MEMS driving mode. The optical force and torque of a micro-propeller-shaped rotor driven by TEM00 Gaussian laser beam are calculated with a geometric-optics model.The optical driving torque is directly proportional to laser power, and it is also related to the factors such as structural sizes of the micro-device and relative refractive index of the operating media for the micro-device. The above factors must be taken into account when designing a micro-device. The calculation shows that when laser power is 100mW, the optical driving torque acting -17 on propeller-shaped rotor is 7.4×10 N ⋅m, which is basically consistent with the previously published experimental results. The proposed approach is suitable for other more complicated three-dimensional micro-rotors and helpful to optimum design of micro-rotors. Key words Optical drivingMicro-propeller-shaped rotor Geometric optics modelOptimum design Rotor