直线时栅测量系统的误差研究-中国科技文献.pdf

第 27 卷 第 1 期 电子测量与仪器学报 Vol. 27 No. 1 2013 年 1 月 JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT · 15 · DOI: 10.3724/SP.J.1187.2013.00015 直线时栅测量系统的误差研究* 1,2 1,2 高忠华 彭东林 (1. 合肥工业大学仪器科学与光电工程学院 合肥 230009; 2. 重庆理工大学机械检测技术与装备教育部工程研究中心 重庆 400054) 摘 要: 研究直线时栅位移测量系统中的误差规律, 对提高时栅测量系统的测量精度及进一步优化系统结构具有重要意义。在 分析直线时栅测量系统误差来源的基础上, 定量分析了时栅误差、导轨误差、滑台及连接臂变形误差, 建立了时栅测量系统的 全误差模型; 研制一套激光干涉仪与时栅测量系统标定实验装置, 实现了时栅测量系统误差的分离, 并利用该模型对测量系统 进行误差修正, 显著提高时栅测量系统的测量精度, 修正后的精度达±8 μm/m, 测量不确定度减小一半。 关键词: 时栅测量系统; 误差模型; 误差修正 中图分类号: TH701;TN9 文献标识码: A 国家标准学科分类代码: 510.8040 Study on error of linear time grating measurement system Gao Zhonghua1, 2 Peng Donglin1, 2 (1. School of Instrumentation Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China; 2. Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing 400054, China) Abstract: The error law in displacement measurement system of linear time grating was researched. It is important for improving the measurement accuracy and further optimizing the structure of the measurement system. On the basis of the analysis of error sources of the system, time grating errors, guideway errors, slide table errors and deformation errors of the linking arm were presented quantitatively, and the total error model of time grating was set up. An experimental device was developed to realize the error separation of the time grating measurement system by the comparison for the laser in- terferometer a