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Investigation of laser-fired point contacts on KOH structured laser-crystallized silicon by conductive atomic force microscopy.pdf

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Investigation of laser-fired point contacts on KOH structured laser-crystallized silicon by conductive atomic force microscopy.pdf

Applied Surface Science 374 (2016) 243–247 Contents lists available at ScienceDirect Applied Surface Science journal homepage: /locate/apsusc Investigation of laser-?red point contacts on KOH structured laser-crystallized silicon by conductive atomic force microscopy Orman Gref a,?, Moshe Weizman b, Holger Rhein c, Onno Gabriel c, Ulrich Gernert d, Rutger Schlatmann b,c, Christian Boit a, Felice Friedrich a a Technische Universit?t Berlin, Semiconductor Devices, Sekr. E4, Einsteinufer 19, D-10587 Berlin, Germany b HTW Berlin – University of Applied Sciences, Wilhelminenhofstr. 75A, D-12459 Berlin, Germany c Helmholtz-Zentrum Berlin für Materialien und Energie, PVcomB, Schwarzschildstr. 3, D-12489 Berlin, Germany d Technische Universit?t Berlin, Center for Electron Microscopy (ZELMI), Str. d. 17. Juni 135, D-10623 Berlin, Germany article info Article history: Received 22 June 2015 Received in revised form 18 November 2015 Accepted 20 November 2015 Available online 22 November 2015 Keywords: Liquid phase crystallization Multicrystalline silicon Laser ?ring Point-contact scheme Atomic force microscopy abstract A conductive atomic force microscope is used to study the local topography and conductivity of laser?red aluminum contacts on KOH-structured multicrystalline silicon surfaces. A signi?cant increase in conductivity is observed in the laser-affected area. The area size and spatial uniformity of this enhanced conductivity depends on the laser energy ?uence. The laser-affected area shows three ring-shaped regimes of different conductance depending on the local aluminum and oxygen concentration. Finally, it was found that the topographic surface structure determined by the silicon grain orientation does not signi?cantly affect the laser-?ring process. ? 2015 Elsevier B.V. All rights reserved. 1. Introduction Laser processing is a common technique in modern photovoltaic industry [1]. The range of application starts with the selective local removal of material for layer