施文康教授报告（声表面波技术）.ppt

SAW TechnologyandIts Applications Outline Concept: What is SAW? Concept: Physical Principal Concept: Historical Review Concept: Advantages Outline Materials Piezo-Materials: Quartz LiNbO3 LiTaO3 LGS The Properties SAW related: 1. Mechanical-Electronic Coupling Coefficient. 2. Temperature Related Factor ( TCF ) 3. Dielectric Factor 4. Phase Velocity 5. Yang’s Model 6. Density 7. Insertion Loss 8. Elastic Coefficient Outline Mathematic Model Force Equilibrium Equation Outline Outline Typical Applications Vibration and Acceleration SAW Sensor Torque SAW Sensor Flow SAW Sensor Liquid SAW Sensor Gas SAW Sensor Application Examples of SAW technology in Automobile Electronic ID Smart Tire Exhaust-gas Detection Exhaust-gas detection Outline Outline Research on SJTU Theoretical work: --- Numerical method to solve Christoffe equation --- Various wave characteristics --- Optimal design --- Phase detection criterion --- Coupling mode theory Research on SJTU Laboratory work: --- Fabrication and test of SAW devices ID-Tag prototype Lamb wave device (measuring liquid density) --- Circuit design and implementation wireless data transmission platform for conventional sensors Lamb wave liquid density sensor Lamb wave liquid density sensor SAW device prototype Electronic Circuit Schematic of transceiver circuits Experiment System Results－ Lamb Liquid Density Results－ Lamb Liquid Density Results－ ID-Tag Measured impulse response vs. time of an ID-tag with bits 1111 SAW Pressure Sensor SAW Pressure Sensor Experiment System Discussion on Key Problems Pressure sensitive coefficient distribution of substrate on (0o,90o, 0o) Discussion on Key Problems Pressure sensitive coefficient distribution of substrate on (7o,143.6o, 31.8o) Projects 1.上海市科委项目，声表面波微传感器研究，沪科 鉴[200