高可靠度产品筛选试验之研究.ppt

Process Control (製程管制) SPC EPC (統計製程管制) (工程回饋控制) Process Control Techniques SPC (Statistical Process Control):Parts industry Control Chart (W. A. Shewhart, 1920) Applied Statistics and Industrial Engineering EPC (Engineering Process Control):continuous process Feedback Control Scheme (Box and Jenkins, 1976) Chemical and Electrical Engineering Statistical Process Control (SPC) Engineering Feedback Control (EPC) Run by Run (RbR) Control 針對 IC 產業 Run-by-Run 之特性所發展出 來的製程管制方法，它整合 DOE (Design of Experiment) EPC (Engineering Feedback Control) SPC (Statistical Process Control) 之優點來監控 IC 生產製程。 The case of SISO System * * Main idea of SPC To monitor the stability of product’s quality characteristics (measurable attributes). Process monitoring is more passive action Common and assignable causes variability In-control state and out-of-control (OOC) state Control chart distinguishes these two states. Process unchanged if no OOC signal appears Take action if OOC signal has been detected Process Feedback Control Input Disturbance Output Either SPC or EPC are not enough in IC manufacturing process 1. SPC only detects the changes of process but does not prescribe suitable control actions. 2. IC manufacturing process consists of several chemical-based, batch-by-batch sub-processes. 3. EPC can not be used directly. The reasons are (a) A precise I-O model is unknown; (b) EPC has the danger of over-adjustment. start Post-measured data RSM Optimal Feedback control EPC Update A new recipe No change Out of deadband? Out of limits of the recipe? Clean and maintain No No Yes Yes SPC 批次控制架構 (Run by Run Control) Process EWMA controller Question : (1) stability conditions (2) optimal discount factor ω ADI CD Cpk improve 20-30 % NTO (New Tape Out) rework rate reduce 20-30% Poly Photo CMP Poly Etch FF Dimension offset of Mask FF FB ADI CD AEI CD electrical performance Su