Influence of trimethylsilane flow on the microstructure, mechanical and tribological properties of CrSiCN coatings in water lubrication》.pdfVIP

Applied Surface Science 355 (2015) 516–530 Contents lists available at ScienceDirect Applied Surface Science j o u rn al h o m e p a g e : w w w. elsev /locate/aps usc Influence of trimethylsilane flow on the microstructure, mechanical and tribological properties of CrSiCN coatings in water lubrication Zhiwei Wu a,b,c , Fei Zhou a,b,∗ , Qianzhi Wang d , Zhifeng Zhou e , Jiwang Yan d , Lawrence Kwok-Yan Li e a State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, China b College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics andJiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing, 210016, China c College of Mechanical and Electrical Engineering, Nanjing Forestry University, Nanjing, 210037, China d Department of Mechanical Engineering, Keio University, Yokohama, 2238522, Japan e Advanced Coatings Applied Research Laboratory, Department of Mechanical and Biomedical Engineering, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong, China a r t i c l e i n f o a b s t r a c t Article history: CrSiCN coatings with different silicon and carbon contents were deposited on silicon wafers and 316L Received 28 January 2015 stainless steels using unbalanced magnetron sputtering via adjusting trimethylsilane (TMS) flow, and Received in revised form 21 June 2015 their microstructure and mechanical properties were characterized by X-ray diffraction (XRD), scanning Accepted 21 July 2015 electr