角分辨XPS测定极薄金膜的厚度和覆盖率.pdfVIP

D I :10.14136/ki.issn1673 -2812.2007.03.007 第25 卷　第3期 　　　　　　　　 总第107期 Vol.25 　No.3 Journal of Materials Science Engineering Jun .2007 :1673-2812(2007)03-0349-04 XPS 1, 2, 3 1 1 1 1, 3 , , 　, 　, (1. , 　730000; 2., 　525000;3., 　100039) 　　【　】　。 X (ARXPS)h, (T A) θ , L=h tgθ 。 min min , T A 17.5°Au 4f ARXPS ;T A7.5°;16.0±0.4 , ～ 92%。 【】　;;;ARXPS; :411;TN304　　　　:A Film Thickness and Coverage ate of Extremely-thin Gold Films Determined by Angle-resolved XPS 1, 2, 3 1 1 1 1, 3 PANG Chong-jun , BAI Ming-wu, YAN Jie , WangBo , LIN Yi-min (1.StateKey Laboratory of Solid Lubrication, LanzhouInstitute of Chemical Physics, CAS, Lanzhou　730000, China; 2.Maoming College, Maoming　525000;3.Graduate School of the Chinese Academy of Sciences, Beijing　100039, China) 【Abstract】　Coverage rate of extremely-thin films sometimes are hard to be quantitatively characterized by routine methods.A new series of metrology hasbeen proposedin this paper by using the single-layer angle-resolved X-ray photoelectron spectroscopy (ARXPS)model to determine the thicknessh of an extremely-thin film, by defining the photoelectron take-off angle (T A)atwhich the substrate signals were no longer being detected as the minimum substrate-signal T A θ , and by using a model of taking the maximum naked-area length L =h min tgθ as the diameter of the round snaked-substrate area to estimate the film coverage rate.The metrology was applied to extremely-thin min island-shaped gol