基于四象限探测器的掩模版对准检测与控制.pdfVIP

第 20 卷 　第 5 期 传 感 技 术 学 报 Vol . 20 　N o . 5 2007 年 5 月 CHIN ES E J OU RNAL O F S EN SORS AND AC TUA TORS May . 2007 Measure and Control f or IC Mask Al ignment Based on Quadrant Detectors WA N G J i anh ua1, 2 , X U D e1 , L I U Yun 1 , 2 , Z H A O X i aog uang 1 , WA N G X i uqi ng 1 , 2 , TA N M i n1 1. L aboratory of Comp lex S y s tems an d I ntel l i g ent S cience , I ns t it ute of A utom at ion , Chi nese A ca demy of S ciences , B eij i ng 100080 , Chi na; 2 . Gra d uate Uni vers ity of Chi nese A ca demy of S ciences , B eij i ng 100049 , Chi na Abstract :A mea sure and cont rol sy st em for Int egrat ed circuit ( IC) ma sk alignment ba sed on Pro grammable Cont roller ( PL C) and quadrant det ector s i s p re sent ed . The mea sure device con si st s of t wo quadrant det ec tor s , w hich mea sure alignment er ror s in realtime . The alignment er ror s and t he motion s of IC ma sk can be decoup led via rea sonably choo sing t he po sition and orient ation of t he mea sure device . Pro grammable cont roller i s emp loyed to adj u st t he manip ulator ’s p o sition and orient ation in or der to align t he IC ma sk ac cor ding to t he alignment er ror s. Furt her more , a st ep wi se app roach wit h varyin g st ep lengt h s , and a co m p en satio n st rat egy following t he manip ulator ’s rot ation are int ro duced in t he IC ma sk alignment . The ex p eriment al re sult s verified t he eff ectivine ss of p rop o sed sy st em an d met ho d s. Key words :quadrant det ector ;alignment ;mea sure and cont rol ; IC ma sk EEACC :2550 G;3210 P 基于四象限探测器的掩模版对准检测与控制 1 ,2 1 1 ,2 1 1 ,2 1