表面形貌对红外激光散射特性的影响研究.docVIP

  表面形貌对红外激光散射特性的影响研究# 张福民，朱元庆* （天津大学精密测试技术及仪器国家重点实验室，天津 300072） 5 10 15 20 25 30 35 40 摘要：为了研究激光在实际加工表面的散射特性, 利用分辨率为 10nW 的激光功率计 PM100D, 波长为 1550nm 的激光器和精密转台, 自行设计并搭建了半球空间中目标表面散射特性的测 量系统. 以典型的刨床加工的若干标准粗糙度比较样块为被测目标, 在 1550nm 红外激光以 不同方位照射下, 测量了微观具有 V 型槽结构的不同粗糙度的样块表面的散射功率分布. 实 验结果转换成双向反射分布函数后, 对比分析了入射光方位、入射角和表面粗糙度对此类典 型表面散射特性的影响, 并分析了特殊散射场形成的原因. 结果表明, 表面纹理、入射角以 及粗糙度均对目标表面的散射特性有规律性影响, 这一结果对于具有规律性加工纹理表面 的散射特性的研究和建模有一定的参考价值,对激光技术在实际加工表面的应用研究提供了 一定的基础。 关键词：散射特性；双向反射分布函数；红外激光；实际加工表面 中图分类号：TB92 Influences of surfaces on Infrared laser scattering characteristics ZHANG Fumin, ZHU Yuanqing (State Key Laboratory of Precision Measuring Technology and Instruments, Institute of Precision Instrument and Opto-electronics Engineering, Tianjin, 300072) Abstract: In order to study the scattering characteristics of practical machining surfaces under the infrared laser irradiation, an experiment device is designed to measure the semispherical scattering characteristics of machining surfaces. The measuring system consists of a laser power meter with a resolution of 10 nW, a laser device of 1550 nm wavelength, and two precisely rotating platforms. The distributions of scattering power from the specimen surfaces with micro V-groove structures and different surface roughness values are measured under the irradiation of 1550 nm infrared laser. After the measured results are converted into the bidirectional reflectance distributional function the effects of incident azimuthal angle, incident angle, and surface roughness on the scattering characteristics of surface of such a kind are comparatively analyzed, and the cause for the formation of special scattering field is also analyzed. The experimental results indicate that the surface texture, incident angle and surface roughness all affect the scattering property in a regular manner. The results contribute to the study of surface scattering characteristics and the application of laser technology to surfaces with V-groove structures. Key wor