掠角沉积技术的应用、理论及工艺方法.docVIP

 Application, Theory and Process of Glancing Angle Deposition# 5 10 15 20 25 30 35 40  Abstract: Thin film technology has a long history. With the development of nanotechnology, thin film characterized by nanostructure has been a new research hotspot. In recent years, glancing angle deposition (GLAD), as a effective way to build nanosturcture thin film, has gained significant attention due to a manifold of possible applications, such as photonic crystals, humidity or pressure sensors and energy. This review summarizes the typical application, theory and method of GLAD. Keywords: Nanotechnology; Glancing angle deposition; nanostructure thin film 0 Introduction Thin film technology is a classical surface treatment with a long history and usually used for anti-corrosion and wear resistance. With the development of nanotechnology, thin film characterized by particular nanostructure illustrates some new feature, proposing thin film technology a research hotspot. Glancing angle deposition (GLAD) is the most promising method for fabrication of nanostructure thin film due to High efficiency and relatively simple process comparing with other nanofabrication [1]. GLAD is an extension to oblique angle deposition which has been of interest to the thin film community for more than a century owing to the enhancement of properties resulting from porous structure. Oblique depositions usually use fixed substrate, but during GLAD processing the substrate position is manipulated. Researchers expect that they could manipulate the columnar structure by actively managing substrate position during deposition and as a result focus on it more. Especially modern GLAD has been added to real-time feedback and computer control to the substrate position, making structure incresing improvement in structure and quality [2-6] 1 GLAD Applications 1.1 Optical Applications It is an important application of GLAD for fabricating three-dimensional (3D) photonic crystals (PCs). In a PC, the material