静电悬浮磁盘的水平系统仿真——中英文翻译、外文翻译.docVIP

System Level Simulation of an Electrostatically Levitated Disk Michael Kraft and Alan Evans University of Southampton, Highfield, Southampton, SO17 1BJ ABSTRACT This paper describes the derivation of a system-level model for a micromachined disk which is levitated by electrostatic forces. Such a system has many potential applications for inertial sensors, micro-motors, microfluidic and micro-optical devices. As a simulation tool Matlab/Simulink was used since it can easily handle different domains such as electrical and mechanical without special arrangements. Multi-axis electro-mechanical sigmadelta modulators were chosen to control the various degrees of freedom of the levitated disk. Of special interest is the power-up phase at the end of which the control system has to ensure that the disk is centred between the top andbottom electrodes. Keywords: Electrostatic levitation, inertial sensors, systemlevel simulation. 1 INTRODUCTION Electrostatic forces are commonly used for actuation of micromachined devices e.g. force-balanced inertial sensors, microfluidic valves and micro-optical mirrors. However, in all these devices a mechanical connection exists between the actuated part and the substrate, the properties of which are subject to considerable process tolerances and cannot be changed easily once the device has been manufactured. In this paper a micromachined disk is suggested which is levitated by electrostatic forces. This has many potential applications such as accelerometers with online dynamic characteristics tuning, gyroscopes if the disk is spun and the precession of the disk induced by the Coriolis force is measured, microfluidic mixers and pumps, frictionless bearings for micro-motors and micro-optical light choppers. Surprisingly little work has been undertaken in this direction . The system, as shown in fig.1, consists of a nickel disk manufactured by electroplating which is encaged by sets of electrodes on top and bottom and electroplated pillars at t