GB/T 44514-2024微机电系统（MEMS）技术　层状MEMS材料界面黏附能四点弯曲试验方法.pdf

ICS

31.080.99

CCS

L

59

中华人民共和国国家标准

GB/T44514—2024/IEC62047﹘31:2019

微机电系统（MEMS）技术

层状MEMS材料界面黏附能四点弯曲

试验方法

Micro-electromechanicalsystem(MEMS)technology—Four-pointbendingtest

methodforinterfacialadhesionenergyoflayeredMEMSmaterials

(IEC62047-31:2019,Semiconductordevices—Micro-electromechanical

devices—Part31：Four-pointbendingtestmethodforinterfacialadhesionenergy

oflayeredMEMSmaterials,IDT)

2024-09-29发布2024-09-29实施

国家市场监督管理总局

发布

国家标准化管理委员会

GB/T44514—2024/IEC62047﹘31:2019

目次

前言

Ⅲ

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范围

1

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2

规范性引用文件