临界喷嘴在真空泵抽速测试及计量中研究和应用.pdf

第44卷

第4期真空科学与技术学报

2024

年

4

月CHINESE

JOURNAL

OF

VACUUM

SCIENCE

AND

TECHNOLOGY325

临界喷嘴在真空泵抽速测试及计量中研究和应用

1*11123

徐法俭刘继睿袁铮任昌青姜云锋董钦敏

(1.

淄博真空设备厂有限公司

淄博

255200；2.

国家泵类产品质量检验检测中心(山东)

淄博

255200；

3.

沈阳水泵研究所有限公司

沈阳

110869)

ResearchandApplicationofCriticalNozzlesinVacuum

PumpSpeedTestingandMeasurement

1*11123

XU

Fajian，LIU

Jirui，YUAN

Zheng，REN

Changqing，JIANG

Yunfeng，DONG

Qinmin

(1.

ZiboVacuumEquipmentPlantCo.,Ltd.,Zibo255200,China;

2.

NationalProductsQualityInspectionandTestingCenterfor

Pumps(Shandong),Zibo255200,China;

3.

ShenyangPumpResearchInstituteCo.,Ltd.,Shenyang110869,China)

AbstractThere

are

various

methods

for

measuring

the

pumping

speed

of

vacuum

pumps,

and

their

accuracy

is

affected

by

methods,

instrument

accuracy,

and

other

factors.

The

constant

flow

method,

as

one

of

the

methods,

is

based

on

the

theory

of

compressible

fluids

in

one

element.

The

article

combines

the

basic

theory

of

one-dimensional

compressible

fluids

with

existing

testing

methods,

proposing

to

use

the

critical

state

of

the

nozzle

as

the

basis

for

measuring

the

constant

flow

rate

method.

By

the

appearance

of

the

critical

state

of

the

nozzle

and

the

calculation

of

the

critical

value,

as

the

benchmark

value

for

measuring

the

flow

rate

of

the

vacuum

pump,

only

environmental

parameters

need

to

be

measured

during

the

measurement

process

to

determine

the

flow

rate

of

the

va