超薄熔石英玻璃co2激光热熔六焊接工艺的研究.docVIP

 超薄熔石英玻璃 CO2 激光热熔焊接工艺的 研究# 王文华1,3，于清旭1，姜心声2** 5 10 15 20 25 30 35 40 （1. 大连理工大学物理与光电工程学院，辽宁 大连 116024； 2. 福建福晶科技股份有限公司，福州 350002； 3. 广东海洋大学理学院，广东 湛江 524088） 摘要：利用小功率 40kHz 的 CO2 脉冲激光对 25μm 厚的超薄熔石英玻璃与熔石英毛细管端 面进行热熔焊接，研究和分析了占空比(脉冲激光功率)、离焦激光预热、离焦激光退火对熔 石英玻璃热熔焊接的影响。结果表明：实现超薄熔石英玻璃与毛细管端面无汽化穿孔、密封、 牢固焊接的占空比为 37；占空比为 20 的+2mm 离焦脉冲激光预热对超薄熔石英玻璃无裂纹 /裂缝的焊接起到了关键作用；适当占空比的-2mm 离焦脉冲激光退火能够释放超薄熔石英玻 璃在热熔焊接过程中产生的残余热应力，提高熔石英器件的性能，经热熔焊接的光纤法-珀 传感器的压力和温度曲线的线性度分别为 0.9995 和 0.9991，而且重复性好。 关键词：激光技术；CO2 激光；热熔焊接；熔石英玻璃 中图分类号：TN249 Study on CO2 laser heating fusion welding technique of ultra-thin fused silica glass WANG Wenhua1,3, YU Qingxu1, JIANG Xinsheng2 (1. School of Physics and Optoelectronic Engineering, Dalian University of Technology, LiaoNing DaLian 116024; 2. Fujian Castech Crystals Inc., FuZhou 350002; 3. School of Science, Guangdong Ocean University, GuangDong ZhanJiang 524088) Abstract: The study on the heating fusion welding between the ultra-thin fused silica glass with 25μm-thickness and the end face of the fused silica capillary tube was carried by using low power CO2 pulse laser with a pulse frequency of 40kHz. The duty ratio, the defocus laser preheating and the defocus laser annealing impacting on the heating fusion welding of the fused silica glass were researched and analyzed. The results show that a duty ratio of 37 could perform perfectly the no penetration, sealing and firm welding between the ultra-thin fused silica glass and the fused silica capillary tube. For the welding without crack or split of the ultra-thin fused silica glass, the preheating of the +2mm defocus pulse laser with a duty ratio of 20 plays a key role. The annealing of the -2mm defocus pulse laser with an appropriate duty ratio can release the residual thermal stress produced in the process of the heating fusion welding in the ultra-thin fused silica glass, enhancing the performance of the fused silica device. The pressure and temperature linearity of the fiber-optic F-P sensor welded perfectly by th