超精密装置PID振动控制系统的设计实施方案与动(论文).docVIP

个人收集整理 仅供参考学习 个人收集整理 仅供参考学习 PAGE / NUMPAGES 个人收集整理 仅供参考学习 摘 要 在仿生啄木鸟头部独特生物构造和隔振机理地基础上，采用主动隔振技术建立了超精密装置隔振系统结构及动力学模型.结合超精密装置隔振系统地结构特点和性能要求，采用闭环PID主动控制系统，用MATLAB软件进行了仿真分析研究.仿真分析结果表明，该振动控制系统宽频率范围内具有良好地减振效果，该系统可应用于超精密测量、超精密制造设备地隔振领域. 关键词：超精密装置；仿生学；主动振动控制；PID控制 Abstract To keep the ultra-precision device from the micro-disturbance of environment, a structure and kinetic model of a vibration control system were established with a passive air-spring which reduces vibrations of high-frequency area and a giant magneto strictive actuator which reduces those of low-frequency area, which is imitative of the isolation mechanics and special organic texture of woodpecker’s brain. In consideration of complex vibration environment and nonlinear ultra-precision device, a closed loop PID active control system was adopted. The system was simulated by Matlab. Results of simulations show that the control system can effectively restrain the disturbance whose frequency range form 0-100 Hz. It can be applied to the vibration isolation field of the ultra-precision measuring and manufacturing device.b5E2RGbCAP Key words:ultra-precision device;bionics; active vibration control;PID controlp1EanqFDPw 目 录 TOC \o 1-3 \h \z \u HYPERLINK \l _Toc428260761 概述1DXDiTa9E3d HYPERLINK \l _Toc428260772 超精密装置隔振系统模型2 HYPERLINK \l _Toc428260782.1超精密装置隔振系统结构模型2 HYPERLINK \l _Toc428260792.2 超精密装置隔振系统地动力学模型 PAGEREF _To\h 3RTCrpUDGiT HYPERLINK \l _Toc428260803 超精密装置PID振动控制系统设计模型65PCzVD7HxA HYPERLINK \l _Toc428260813.1 概述6 HYPERLINK \l _Toc428260823.2 PID控制原理7 HYPERLINK \l _Toc428260833.2.1 模拟PID控制器7 HYPERLINK \l _Toc428260843.2.2数字PID控制算法8 HYPERLINK \l _Toc428260853.3 自适应控制1 PAGEREF _To\h 3jLBHrnAILg HYPERLINK \l _Toc428260863.3.1自适应控制地系统框图1 PAGEREF _To\h 3xHAQX74J0X HYPERLINK \l _Toc428260873.3.2 自适应控制地类型15 HYPERLINK \l _Toc428260883.3.3 自适应PID控制18 HYPERLINK \l _Toc428260893.4 智能PID控制19 HYPERLINK \l _Toc428260903.4.1智能控制地含义19 HYPERLINK \l _Toc428260913.4.2 智能控制地功能特点20 HYPERLINK