钙铝硼硅氧化铝玻璃陶瓷性能研究-微电子学与固体电子学专业论文.docxVIP

华中科技 大学硕士 学 华 中 科 技 大 学 硕 士 学 位 论 文 II II Abstract With the rapid development of electronic information technology, electronic components become more integrated and high stabilization. LTCC (Low Temperature Co-fired Ceramics) technology has become increasingly important because it is suitable for high density integration and assembly of electronic components. As the key component of the LTCC technology, the LTCC substrates are required to meet the low dielectric constant, low dielectric loss and high flexural strength, for efficient signal transmission and high wiring density. Calcium aluminum borosilicate /alumina glass ceramics not only meet the above requirements, but also have a lead-free environmentally friendly feature, so they become one of the research focus . There are two types of calcium aluminum borosilicate/alumina glass ceramics, respectively crystallized glass/alumina and amorphous glass/alumina. The preparation, microstructure, phase composition, dielectric properties and flexural strength performances of the glass ceramics were investigated. For crystallized glass/alumina, the effects of the glass components and glass particle sizes on the performances of the glass ceramic were investigated. The results show that when CaO/Al2O3 in the glass component is 1.67 and the glass particle size is 1.58μm , the performances of the glass ceramic are the best: the sintering temperature is 875°C, the dielectric constant is 7.88, the dielectric loss is 0.0011, the flexural strength is 161Mpa. To further optimize the performances of glass ceramic, the effects of the alumina particle sizes and alumina contents on microstructure and macroscopic electrical and mechanical properties of the material were investigated. The results show that when the alumina content is 50 wt%, the alumina particle size is 2.6μm , the dielectric properties of the glass ceramic are the best: the dielectric constant is 7.88, the dielectric loss is 0.0011; when the alumina content i