硅基光子晶体波导的优化设计及其耦合器件的分析-optimization design of silicon-based photonic crystal waveguide and analysis of its coupling devices.docx

华中科技大学博士学位论文华中科技大学博士学位论文II万方数据II万方数据晶体平板波导中心波导区宽度和不同条形波导宽度下实现耦合时所需的相位匹配条件，并利用时域有限差分法对相位匹配条件进行了验证，在相位匹配条件下此种耦合 器件可在约 36 微米长度内实现最高约为-3 dB 的耦合效率。(3) 针对狭缝型光子晶体平板波导，提出了一种基于亚波长量级光栅波导的侧向 耦合方案。通过调整狭缝型光子晶体平板波导中狭缝的宽度，可以得到两种不同的模 式，利用平面波展开法，对狭缝型光子晶体平板波导中的不同模式和亚波长量级的光 栅波导的能带特性进行了分析，通过调整亚波长量级光栅波导的宽度和占空比，得到 了两波导耦合的相位匹配条件，并利用时域有限差分法对相位匹配条件进行了验证， 在相位匹配条件下，针对类普通光子晶体波导型模式，可在约 20 微米内实现最高约-0.8 dB 的耦合效率，针对类狭缝型模式，可在约 12 微米内实现最高约-0.8 dB 的耦合 效率。关键词：硅基光子学 慢光 光子晶体波导 群速度色散 侧向耦合 条形波导 亚波长量级光栅波导III万方数据III万方数据AbstractWith the advent of the information explosion age, the traditional microelectronics technology using electrons as information carriers faces a large quantity of difficulty and pressure. While the silicon-based integrated optoelectronics using photons as information carriers provides the new devices, the new interconnect technologies and the new integration schemes for the microelectronics industry. It can provide cheap devices with low power consumption and high quality because it is compatible with the current microelectronics fabrication technology, which makes it the most promising candidate for the microelectronics industry and the leader to extend the Moore’s Law. In the silicon-based optoelectronics integrated circuit, the basic waveguide devices become the hot topic. Especially the silicon-based photonic crystal waveguides attract close attention and extensive research because of their compactness, low bending loss and high nonlinearity taking advantage of the slow light.In this thesis, the numerical simulation methods of the photonic crystal devices based on the basic theory of photonic crystal are introduced along with the designing and analyzing methods of the photonic crystal waveguide. The photonic crystal waveguides with zero dispersion have been designed and optimized. Based on the photonic crystal waveguides, the light coupling to the photonic crystal waveguides with zero dispersion and the slot photonic crystal waveguides have been focused, including the design of the