Laserproduced plasma for EUV lithography激光产的等离子体EUV光刻.pptVIP

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Laserproduced plasma for EUV lithography激光产的等离子体EUV光刻.ppt

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Laserproduced plasma for EUV lithography激光产的等离子体EUV光刻

* * * * * * * * * * * * * * * * * * * * * * * * The Application of Technology Readiness Levels in Planning the Fusion Energy Sciences Program M. S. Tillack ARIES Project Meeting 4–5 September2008 Topics Status and plans Oral and printed publication of our results TOFE Presentation Dry run, solicit recommendations for improvement Possible adjustments for broader (FESAC) consumption (later) Discussion of TRL evaluation results, pathway analysis Current readiness, value of ITER, role of CTF Discussion Revisions, action items to complete this exercise Review of progress Jun 07 Aug 08 Dec 07 Mar 08 TWG’s created, tasked to define RD status needs, plans options Advisory committee meeting Agreed to adopt TRL’s Defined issues and assigned individuals to create/describe TRL’s Methodology defined, based on utility requirements Draft TRL tables produced, report outline created Reference concepts defined, first evaluation performed Report details filled in Scenarios examined Publications 95% complete May 08 Idea of using TRL’s floated Sep 07 Plans to present TRL methodology to the broader community(see /ARIES/WDOCS/ARIES07/TWG/) Printed matter TWG “Interim Report” UCSD-CER-08-01 (posted on web site ASAP) Proceedings of TOFE (preprint to be distributed at TOFE) ANS Newsletter, December 2008 Oral presentations TOFE invited talk, 9/30/08 ARIES HHFC workshop, 12/10/08 FESAC meeting, if rescheduled UCSD-CER-08-01 University of California, San Diego Current Status UCSD-CER-08-01 ~70 pages, 95% complete, under final review evaluation of current TRL, with ITER, role of CTF TOFE paper 8 pages, 95% complete, same as interim report selected tables presented due to space limitation 1. plasma power flows, 2. tritium control, 3. plasma control ANS Newsletter Due November 1 TOFE talk Complete draft, to be shown today ARIES HHFC Same as TOFE, except more emphasis on HHFC FESAC talk Partial draft, to be integrated with Raffray’s work? May require some revisions, depending on the preva