一种集成3 d mems力传感器的微夹持器的研究-research on a micro - gripper integrated with 3 d mems force sensor.docxVIP

摘 要过去的十多年间，微操作技术得到了长足的发展，其应用已经广泛涉及到 微系统、生物工程、医学等领域。当前，大多数情况下只是在视觉伺服控制下 进行微操作，在操作过程中，由于不能获取有效的微力反馈信息，很难实现高 精度和可靠的控制。微夹持器在操作过程中直接与物体、周围环境接触，存在 复杂的交互力。针对现有的微夹持器不能检测有关力的信息，或只能感知一维 力信息的不足，研制了一种集成 3-D MEMS 传感器的微夹持器。在参阅了国内外大量微夹持器、微力传感器的文献的基础上，从微观领域 的实际情况出发，以驱动方式为根据，提出了一种集成 3-D 微力传感的微夹持 器的结构原型。对基于柔性铰链的微位移放大机构进行数学建模、力学分析， 并利用有限元软件仿真，实现参数优化。为满足微夹持器的需要，设计了半导体压阻式 MEMS 微力传感器，分析 了微力传感器的工作原理，对其结构形式进行了建模、分析，求取了结构的最 优参数；给出了压阻式传感器的基本设计原则，选择了合理的材料，以力学分 析为根据，确定了力敏电阻条的位置，并对电阻条进行了设计，介绍了微机械 制作技术，给出了传感器芯片制备流程。针对传感器测量力极小的特点，采取了利用悬臂梁加载、显微视觉测量的 微力间接标定法进行传感器标定，设计了悬臂梁、标定装置，采用线性解耦方 法，进行了标定实验，求解出标定矩阵，对传感器的静态性能进行了测试。集成了微夹持器，测试了微夹持器位移特性，获得了电压－位移曲线，通 过夹持实验，验证了这种微夹持器方案切实可行。微夹持器是实现微操作的重要工具，集成多维力传感的微夹持器可以改善 微操作、微装配的可操作性，并使夹持器末端以及物体得到保护。本课题的成 功将有助于微操作的发展与应用。关键词微操作；微夹持器；MEMS 微力传感器AbstractMicromanipulation is an important emerging technique developed mainly during the past decade, which is widely applied in the fields of micro system, bio- engineering, microsurgery manipulation, and so on. Most of the cases, operators manage to manipulate the objects with the optical microscope, when the size of the objects is some microns to submillimeters. Two dimensional image is not enough to manipulate micro objects precisely and reliable during the process of micromanipulation, for there is complex interactive force between the objects and tools. Microgripper is the main tool in micromanipulation and microassembly. By far, there are several kinds of microgripper, but force information is not available or is limited in only one direction. And therefore, it is necessary to develop a microgripper with multi-sensor.After lots of papers related microgripper and microforce sensor consulted, a microgripper with 3 dimensional force sensor is presented from the point of microscopic field and according to the driving method. A micro displacement amplifier based on flexible hinges is designed, modeled and analyzed. And after the structure simulated by the aid of the Finite Element Method (FEM) software ANSYS, the optimal para