苏州某半导体企业作业指导书（经典）.docVIP

1 the process for switch on 1.1 the preparation： 1.1.1 check all connection are ok. 确认所有的链接都是ok 1.1.2 check that all protective equipment for the LLSEVO II is connected and make sure that this equipment functions correctly 确认所有的保护设备都已经连接，并且功能正常。 1.1.3 check the operating media for the vacuum pumps 确认真空泵所需的气体等是正常的 1.1.4 inspect the water lines for wetness(leaks) 检查水管是否漏水 1.1.6 Open the drain valve first and then the supply valves.and check the water pressure to approx 4bar 先开出水阀，再开供水阀，并且检查水的压力是否是4bar，如果不是，则进行调整 1.1.7 open the compressed air supply and check the static pressure at the compressed air conditioner to 6-8bar 打开压缩气体的供气阀，并确认静态压力是 6-8bar。 1.1.11 open the process gas supply and check the static pressure to approx 0.5bar 打开制程用气体（Ar），并且确认其静态压力大约是0.5bar 1.1.12open the vent gas supply and check the static pressure to approx.1.5 bar. 打开N2的供气阀，并且确认其静态压力大约为1.5bar 1.1.13 check that all EMERGENCY-OFF buttons are released 使所有的EMO键都被开启 1.2 the method for switch on （开机方法） 1.2.1 Switch on the main switch at the power rack door from ?0? to ?I? 打开电控柜上的电源主开关 （如图所示） 1.2.2Switch on the UPS power 打开UPS的电源开关（如图所示） 1.2.3Switch on the PLC power, then the red light will shine 打开PLC电源，这时PC上的红灯将会闪烁。如图说示 1.2.4 push down the RESET on the rack . 1.2.5when the status is stabile in the PLC ,then Switch on the GUI power. 1.2.6 waiting for the overview showing. 1.27 click” push to enter” 2.the process for switch off 2.1Checking all processes are ended 2.2check the cage is in the Load Chamber 2.3check the door of LC is closed 2.4click[Miscellaneous]〉[GUI Control] click[Miscellaneous]〉[GUI Control] 2.5click[shut down PLC PC] click[shut down PLC PC] 2.6click[shut down GUI PC] click[shut down GUI PC] 2.7switch off the main power 2.7.1switch off UPS 2.7.2switch off the cooling water enter in 2.7.3switch off the cooling water out 2.7.4off the main gas valve 2.7.5push down all the EMO switch 3.The process for