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Design of Coplanar Waveguide Multilayer Square Spiral Inductors for Monolithic Microwave Integrated Circuits Djuradj Budimir,1 Ian D. Robertson,2 Q. H. Wang,4 A. A. Rezazadeh3 1 Department of Electronic Systems, University of Westminster, London W1M 8JS, United Kingdom; e-mail: budimir@cmsa.wmin.ac.uk 2 Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, United Kingdom 3 Department of Electronic and Electrical Engineering, King’s College, University of London, London WC2R 2LS, United Kingdom 4 COMDEV Ltd., Cambridge, Ontario, Canada N1R 7H6 Receied 21 April 1998; reised 12 Noember 1998 ABSTRACT: A square indicator using multilayer coplanar waveguide transmission lines on a GaAs fabricated by using monolithic microwave integrated circuits (MMIC) technology is presented. The polyimide layer formation, curing and dry etching processes are used in an attempt to obtain high quality dielectric layers suitable for MMIC applications. The experimental fabrication progress provides two metal layers with two polyimide spacer dielectric layers. A brief overview of the electromagnetic design process is included. The performance of the proposed spiral inductor is investigated experimentally and with electromagnetic simulations (Sonnet em ) up to 20 GHz using RF-on-water measurements. A very good agreement is achieved, despite the highly three-dimensional nature of the structure. 1999 John Wiley Sons, Inc. Int J RF and Microwave CAE 9: 86 92, 1999 Keywords: monolithic microwave integrated cir