A novel 3D stitching method for WLI based large range surface topography measurement文档.pdf

Optics Communications 359 (2016) 435–447 Contents lists available at ScienceDirect Optics Communications journal homepage: /locate/optcom A novel 3D stitching method for WLI based large range surface topography measurement Zili Lei a, Xiaojun Liu a, Li Zhao b, Liangzhou Chen a,n, Qian Li a, Tengfei Yuan a, Wenlong Lu a a The State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, China b Automotive Engineering College, Xiangyang Vocational and Technical College, 18 Longzhong Road, Xiangyang, China a r t i c l e i n f o a b s t r a c t Article history: 3D image stitching is an important technique for large range surface topography measurement in White- Received 4 June 2015 Light Interferometry (WLI). However, the stitching accuracy is inevitably influenced by noise. To solve Received in revised form this problem, a novel method for 3D image stitching is proposed in this paper. In this method, based on 20 September 2015 noise mechanism analysis in WLI measurement, a new definition of noise in 3D image is given by an Accepted 21 September 2015 evaluation model for difference between the practical WLI interference signal and the ideal signal. By this new definition, actual noises in 3D image are identified while those practical singular heights on surface Keywords: will not be wrong