[工作范文]8080section43.pdf

4.3 Scanning Probe Techniques Hoichang Yang CONTENTS 4.3.1 Introduction301 4.3.2 Atomic Force Microscopy (AFM) 303 AFM Tip Shape304 Basic Principle of Intermediate Contact Mode (Tapping Mode)305 Applications306 4.3.3 Electric Force Microscopy (EFM) 310 Basic Principle311 Applications313 4.3.4 Kelvin Probe Force Microscopy (KFM) 316 4.3.5 Conducting Probe AFM (CP-AFM or C-AFM) 319 Applications of CP-AFM321 References331 4.3.1 INTRODUCTION Scanning tunneling microscopy (STM) [1], with atomic-scale imaging, and atomic force microscopy (AFM) [2], which was originally introduced for high-resolution surface topography of conducting or nonconducting materials, have been pivotal in opening up many new research directions in past years. Scanning probe microscopy (SPM) includes STM, AFM, and other application modes based on AFM, a few of which are magnetic force microscopy (MFM) [3], electric force microscopy (EFM), Kelvin probe force microscopy (KFM), conducting probe-AFM (CP-AFM), near- field scanning optical microscopy (NSOM) [4,5], and scanning capacitance micros- copy (SCM) [6,7]. Although AFM was initially introduced as a small part of STM, AFM has become an advanced and developed scanning probe technique with broad applications in academic and industrial research. It is also applied for quality control in a number of industries. Because AFM can be described as high-resolution profiling of surfaces with a sharp probe, this technique can be applied for measurements of surface textures of various materials and also for quantitative examination of shapes/profiles of tech- 301 © 2007 by Taylor Francis Group, LLC 302 Organ