外文文献译文2.doc

本科毕业论文 外文文献及译文 文献、资料题目：A NEW CAPACITIVE DISPLACEMENT SENSOR WITH HIGH ACCURACY AND LONG RANGE 文献、资料来源： Sensors and Actuators A: Physical 文献、资料发表（出版）日期：2006.8 院 （部）： 信息与电气工程学院 专 业： 电气工程与自动化 班 级： 电本064 姓 名： 郑媛 学 号： 2006081078 指导教师： 李红民 翻译日期： 2010.6 外文文献： A NEW CAPACITIVE DISPLACEMENT SENSOR WITH HIGH ACCURACY AND LONG RANGE ABSTRACT A new capacitive displacement sensor is designed and fabricated for measurement of a large displacement with very high accuracy. This sensor is a kind of linear encoder with an array of micro electrodes made by micromachining processes. The two patterned electrodes on the sensor substrates are assembled facing each other after being coated with thin dielectric film. Due to the thin dielectric film, it is highly sensitive to displacement but minimizes expected misalignments such as a tilting error. The sensor fabricated as a sample has a grating of electrodes with a width of 100μm, which is coated with a Diamond-Like Carbon (DLC) film 0.8 μm thick. The proposed sensor was tested to conclude that its resolution is 9.07 nanometers for the measuring range of 15 millimeters and that the linearity error is expected to be less than 0.02% throughout the measurable range. Keywords: Encoder, capacitive displacement sensor, DLC, contact-type, high resolution INTRODUCTION When a nano-positioning system is used for an accurate wide-ranged motion task, a precise long- range displacement sensor should be adopted for precise motion control. A capacitive sensor, a Linear Variable Differential Transformer(LVDT), a Position Sensitive Detector(PSD) can detect displacements down to the subnanometer range, but are limited to maximum measuring displacements of a few hundred micrometers[1~4]. Alternatively, a laser interferometer and an optical linear encoder can operate over a wide range but they are not cost-effective due to their complex structure and have poor compatibility because of their large size [5, 6]. On