三氯氢硅歧化反应精馏生产硅烷的模拟_英文_.docx

三氯氢硅歧化反应精馏生产硅烷的模拟_英文_.docx

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三氯氢硅歧化反应精馏生产硅烷的模拟_英文_

2SiHCl3□?□□□□□?SiH2Cl2??SiCl4(1)2SiH2Cl2□?□□□□□?SiHCl3??SiH3Cl(2)2SiH3Cl□?□□□□□?SiH2Cl2??SiH4(3)SimulationofReactiveDistillationProcessforMonosilaneProductionviaRedistributionofTrichlorosilaneSunShuaishuai(孙帅帅)and Huang Guoqiang (黄国强)*SchoolofChemicalEngineering,TianjinUniversity,Tianjin300072,ChinaAbstractThereactivedistillationprocessforproducinghighpuritymonosilaneviatrichlorosilaneredistributionreaction wassimulated.Rigorous RadFracblock was employedinAspenPlussimulationpackage.Accurateresultscouldbegivenwhenthechemicalkineticswastakenintoaccountintheequilibriumstagemodel.Asinglecolumnprocesswas usedfortheverification ofpreviousstudies.Theresultsshowed that 99.9%puritymonosilanecould beachievedinthereactivedistillation.Apumparoundblockwasemployedtoreducethecondenserduty withinexpen-sivecoolant.Theeffectsofoperatingpressure,feedstagelocation,liquidholdupperstageandpumparoundloca-tionwerealsoinvestigated.Theenergyconsumptionwaslimited,buttherefrigeranttemperaturewastoolow,which isthefataldisadvantage.Therefore,adoublecolumnsprocesswasdevelopedtoincreasethecondensertem-perature.Thesimulationresultsdemonstratedthatareasonabletemperaturecouldbeachievedbyvaryingthere-cyclestreamlocation.Keywordsreactivedistillation,reactionkinetics,trichlorosilaneredistribution,pumparound,monosilane1INTRODUCTIONimprovementoftheprocess.Blocketal.[8]installedanintermediatecondenserabovethereactionzonetoreducetherequisiteamountofthelow-temperaturerefrigerantandincreasetheconcentrationofmonosi-lanebypartialcondensationofthehigher-boilingcomponents.Mulleretal.[9]insertedtheintermediatecondenserinreactionarea.Sinceheatremovalwillreducereactiontemperatureandreactionefficiency,the key problem ishowmuchheatshould beremoved.Sonnenscheinetal.[10]disclosedaheatintegrationmethodforreactivedistillationprocess.Thereactivedistillationcolumnhaddoublewallsespeciallyatthereactionzoneandbelow.Thebottomproductcontain-ingSiCl4wasconveyedviaaheatexchangertopre-heatthefeedstream,andthenintothedoublewallstotr

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