酸碱复合催化溶胶鄄凝胶法制备sio2减反膜及膜性能研究-表面技术.pdfVIP

摇 第42卷摇 摇 第1期摇 摇 2013 年2 月 表面技术 摇 摇 摇 Vol.42摇 No.1摇 Feb.2013 SURFACE TECHNOLOGY 摇摇摇 63 酸碱复合催化溶胶鄄凝胶法制备SiO 减反膜及膜性能研究 2 窦雯雯,牛玉超,黄国威,徐勇,王献忠,王孝丽,张琳琳 (山东建筑大学 材料科学与工程学院,济南250101) 摇 摇 [摘摇 要]摇 采用酸催化法、碱催化法和酸碱复合催化法制备了SiO 溶胶,进而制得SiO 减反膜。 表征了薄 2 2 膜的表面形貌,测定了薄膜的透射率和硬度。 结果表明,不同催化溶胶制得的膜层在表面形貌、减反效果和薄膜 硬度等方面存在明显差异:酸催化得到的薄膜,孔隙率和透过率最低,但硬度和抗划伤性最好;碱催化得到的薄 膜,孔隙率和透过率最高,但硬度和抗划伤性最差;酸碱复合催化得到的薄膜,孔隙率、透过率、硬度和抗划伤性能 介于以上二者之间,性能与酸碱复合催化溶胶的制备工艺密切相关。 [关键词]摇 溶胶鄄凝胶;酸碱复合催化;SiO 减反膜;透过率;表面形貌 2 [中图分类号]O484.4 摇 摇 摇 [文献标识码]A 摇 摇 摇 [文章编号]1001鄄3660(2013)01鄄0063鄄04 Preparation of SiO Anti鄄reflective Coatings by 2 Acid/ Base Composite Catalyzed Sol鄄gel Method and Research on Their Properties DOU Wen鄄wen,NIU Yu鄄chao,HUANG Guo鄄wei,XU Yong,WANGXian鄄zhong, WANGXiao鄄li,ZHANGLin鄄lin (School of Material Science and Engineering,Shandong Jianzhu University,Jinan250101,China) [Abstract]摇 The SiO sol and anti鄄reflective coatings were prepared by the acid,base,and acid/ base composite cata鄄 2 lyzed methods. The surface morphologies of coatings were characterized and their transmissivity and hardness were measured . The experimentsresultsshow that,the surfacemorphology,anti鄄reflectiveeffect andhardnessof thecoatingsfromthree solsare very different;The coating from acid鄄catalyzed sol has the minimum porosity,lowest transmissivity,but highest hardness and best scratch resistance;Thecoatingfromammonia鄄catalyzedsolgetsmaximumporosity,highesttransmissivity,butlowesthard鄄 ness andworst scratchresistance;Thep