北京大学学报（自然科学版）,第50卷,.PDFVIP

北京大学学报 ( 自然科学版), 第 50 卷 , 第 4 期 , 2014 年 7 月 Acta Scientiarum Naturalium Universitatis Pekinensis, Vol. 50, No. 4 (July 2014) doi: 10.13209/j.0479-8023.2014.115 Improved Structure of Time-Divided Closed-Loop Accelerometer by Alternating the Voltage Biasing HUANG Jingqing, ZHAO Meng, ZHANG Tingting, CHEN Zhongjian, WU Feng, HONG Lichen, LIU Dahe, ZHANG Yacong†, LU Wengao, GAO Chengchen, HAO Yilong National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871; † Corresponding author, E-mail: zhangyc@pku.edu.cn Abstract A new structure of time-divided closed-loop accelerometer is proposed. It requires only one operational amplifier as a negative-coefficient PID is just sufficient. This structure not only reduces the area consumption of the whole chip of the readout circuit, but also lowers the equivalent input noise acceleration as one operational amplifier and two large resistors are reduced. The readout circuit is fabricated using 0.35 μm HV CMOS process, with self-test function included. Test results show that the linearity of 99.72% is achieved under self-test mode. The root-mean-square output noise voltage is around 140 μV from DC to 200 Hz. Key words proportional integral derivative controller; closed-loop; accelerometer; self-test function; microelec- tromechanical systems 偏置电压交变的时分反馈闭环加速度计 黄靖清 赵猛 张婷婷 陈中建 伍峰 洪理琛 刘大河 张雅聪† 鲁文高 高成臣 郝一龙 北京大学微纳电子学系微纳米/纳米加工技术国家级重点实验室, 北京 100871; † 通信作者 , E-mail: zhangyc@pku.edu.cn 摘要 提出一种改进结构的时分反馈闭环加速度计, 该结构使用负系数的 PID 控制器, 只需要一个运算放大 器。改进后的结构减小了读出电路的芯片面积, 同时省去一个运算放大器和两个大电阻,