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the comparison of environmental effects on michelson and fabry-perot interferometers utilized for the displacement measurement环境影响的比较在迈克尔逊和法布里-珀罗干涉仪用于位移测量
Sensors 2010, 10, 2577-2586; doi:10.3390/s100402577 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article The Comparison of Environmental Effects on Michelson and Fabry-Perot Interferometers Utilized for the Displacement Measurement Yung-Cheng Wang 1,*, Lih-Horng Shyu 2 and Chung-Ping Chang 1 1 Institute of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Yunlin County 640, Taiwan; E-Mail: g9611754@.tw 2 Institute of Mechanical and Electro-Mechanical Engineering, No.64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan; E-Mail: lhshyu@.tw * Author to whom correspondence should be addressed; E-Mail: wangyc@.tw; Tel.: +886-5-5342601 Ext. 4122; Fax: +886-5-5312062. Received: 29 January 2010; in revised form: 10 March 2010 / Accepted: 16 March 2010 / Published: 24 March 2010 Abstract: The optical structure of general commercial interferometers, e.g., the Michelson interferometers, is based on a non-common optical path. Such interferometers suffer from environmental effects because of the different phase changes induced in different optical paths and consequently the measurement precision will be significantly influenced by tiny variations of the environmental conditions. Fabry-Perot interferometers, which feature common optical paths, are insensitive to environmental disturbances. That would be advantageous for precision displacement measurements under ordinary environmental conditions. To verify and analyze this influe
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