重氮树脂单层膜上铜的无电沉积-上海有机化学研究所.PDF

2004 年第 62 卷 化 学 学 报 Vol. 62 , 2004 第 21 期 , 2187～2190 ACTA CHIMICA SINICA No. 21 , 2187 ～2190 重氮树脂单层膜上铜的无电沉积 张茂峰　　杨朝晖　　丛海林　　曹维孝 (北京大学化学与分子工程学院 　北京 100871) ( ) 组装于硅片或玻璃片基片上的重氮树脂 DR 单层膜 ,吸附 Sncl , Pd 催化剂后 ,通过无电沉积的方法 ,在这些基片上 摘要 　 2 制备了铜膜. 对得到的铜膜进行了 SEM , XRD 表征. 通过选择性无电沉积 ,成功地制备了铜膜图像. 关键词 　重氮树脂 ,无电沉积 ,铜膜 ,铜膜图像 Electroless Deposition of Cu on DR Monolayer ZHANG, MaoFeng 　　YANG, ZhaoHui 　　CONG, HaiLin 　　CAO , WeiXiao ( ) College of Chemistry and Molecular Engineering , Peking University , Beijing 100871 Abstract 　The electroless deposition of copper on the monolayer film of diazoresin (DR) , which was fabricated on the silicon or glass surface , was performed via absorbing SnCl2 and Pd on the DR film. The copper film was characterized with SEM and XRD showing that the electroless deposition of copper on the substrate is successful. Through the selective electroless deposition the Cu film pattern was obtained. Keywords 　diazoresin , electroless deposition , Cu film , Cu film pattern ( ) ( ) 　　无电沉积 Electroless deposition , ELD 制备金属铜薄膜 脂 DR 单层膜上进行无电沉积 ,操作简单 ,在水溶液进行 , 及有关图像 ,在微电子用线路版制备及平板显示技术等方面