High Quality, High Speed Processing of （高质量、高速度的处理）.pdf

INDUSTRIAL LASER APPLICATION FOCUS APPLICATIONS LAB High Quality, High Speed NO. 21 Processing of Transparent Brittle Materials using Femtosecond Lasers Laser processing of optically transparent, brittle materials is finding wide use in various manufacturing sectors. For example, in consumer electronic devices such as smart phones, e-readers, and tablet cover glass needs to be cut precisely in various shapes. For machining of curvilinear and internal features, a laser direct ablation process is normally used. Processing of transparent brittle materials using ultrashort pulse lasers has advantages in comparison with long pulse lasers. When an ultrashort laser pulse is focused inside glass, only the localized region in the neighborhood of the focal volume absorbs laser energy by nonlinear optical absorption. Therefore, the processing volume is strongly defined very locally, while the rest of the target stays unaffected. While ablative femtosecond processing provides the quality industrial manufacturers demand, processing speed needs to be improved in order to achieve widespread economical industrial use. Recently, Spectra-Physics has developed a non-ablative femtosecond ™ ® processe (ClearShape ) using the Spirit laser. ClearShape process allows machining of curvilinear and internal close-shaped features in transparent, brittle materials such as chemically s