扫描电子显微镜及原子力显微镜技术之比较_陈耀文.pdfVIP

　2006　 11　 1 CH INESE JOURNAL OF STEREOLOGY AND MI AGE ANALYSIS Vo.l 11 No. 1 March 2006 　　　 5 :1007 -1482(2006)01 -005 -06 1 1 1 1 2 , 　, 　 , 　, 　 (1. , 　　　515063;　2. , 　　　515031) 　:SE 和AF 技术是最常用的表面分析方法。本文介绍了 SE 和AF 两种技术的原理, 描述了这两种技术在样品形貌 构、成分分析和实验环境等方面的性能, 比较了两种技术的特性和 不足, 充分利用两种技术的互补性,将两种技术 合使用,有助于更加深刻地认识样品的特性。 :原子力显微镜;扫描电子显微镜;表面形貌;化学成分 + :TG115. 21 5. 3, R319　　　　　　:A The comparison of SEM and AFM techniques 1 1 1 1 2 CHEN Yaowen, 　LIN Yuejuan, 　ZHANG Haidan, 　SHEN Zhewei, 　SHEN Zhongying (1. CentralLaboratory, Shantou University, Guangdong Shantou 515063, China; 2. edicalCollege, Shantou University, Guangdong Shantou 515031, China) Abstract:Scanning electronmicroscopy (SE )and atomic forcemicroscopy (AF )are powerful tools for surface investigations. This article described the principles of these wt o techniques, compared and contrasted these two techniquesw ith respect to the surface structure and composition ofmaterials, and en- vironment. SE andAF are complementary techniques, by having both techniques in an analytical fa- cility, surface investigationsw ill be provided amore complete representation. ey words:atomic forcemicroscopy;scanning electron microscopy;surface structure;composition 　　, 。 (0. 3μm), 1982, Gerd BinnigHeinrich Rohrer IB 。 1924, , (Scanning Tunneling icroscope, ST ), —, , 、 。 。, ST (Scanning Electron icroscopy, SE ), , 1935, 1942, , ST , ST , Binnig 1986 , , , (A tomicForce icroscope, AF )。AF 。 ( ) , 1965, , , SE , 50 nm 。, ST AF , 0. 5 nm,, (ScanningProbe icroscope,