共光路移相单频激光干涉测长系统韩旭东.pdfVIP

30 2 V ol. 30 N o. 2 2 0 0 4 3 O PT ICAL T ECH NI QU E M ar ch 2004 : 1002- 15 82( 2004 02-0 195- 04 * 共光路移相单频激光干涉测长系统 韩旭东, 艾华 ( , 130022 : , / 0 , , , : ; ; ; : TH744 . 3 : A Common-path and phase-shifting single frequency laser interferometer for length measurement HAN Xu-dong, AI Hua ( Changchun I nstitute of O ptics, Fine M echanics and P hysics, Chinese Academy o f Science, Chang chun 130022 , China Abstract: Po larized laser phase shifting metho d is adopted in this single frequency laser inter ferometer to so lve 0 zero dr ift0 of laser intensity in conventional single frequency laser interf erometer. T he measur ement stability and r epeatability are improved by means of common optical path arrangement . T he resolutio n pow er of the inter ferometer is improved by using optical path dif- ference doubling technique. In the ex periment the main f actors that affect the leng th measurement pr ecision ar e analyzed and calculated . Results obtained are show n. Key words: phase shifting ; opt ical pat h difference doubling; common path; precision analysis and determination , 1 , 20 70 , [ 1] , Smy the Moore 1/ 2 , 1/ 4 ( PBS [ 2] Dorsey , Crosdale P alum