半导体厂洁净室之节能措施（Energy-saving measures of clean room of semiconductor plant）.docVIP

半导体厂洁净室之节能措施（Energy-saving measures of clean room of semiconductor plant） Energy-saving measures of clean room of semiconductor plant One, the former words # C0 O t0 ^ n5 O5 w Ii. Current situation of clean room of domestic semiconductor factory Ginseng, energy saving technology 4. X Boss, knot theory) x7 R8 n2 j % E ` 0 E R Wu, references / B! D1 o + _! 7 g# \ L The institute of refrigeration and air conditioning of Taipei university of science and technology/xiao shuo, hu shi zheng, CAI binghuang Clean room for 5 ~ 10 times of general air conditioning system energy consumption, the domestically produced a lack of energy and face energy consumption growing circumstances, how to promote clean room air conditioning system energy saving technology, in order to enhance productivity and competitiveness, is the task that we must face. -c8 D f In recent years, the cutting-edge technology industry rapid development, make the wafer manufacturing or photovoltaic technology level from the micron, submicron to nanometer, the process operation environment of the industry, if not in clean room, the product is not up to precision measurement requirements. At present, the concentration of semiconductor industry is improved, the wafer diameter is large, and the clean room energy consumption can be 5 ~ 10 times that of the general air conditioning system, so the energy consumption is increasingly serious. In order to protect the earths ecological environment and sustainable development, we should be good to the best of human energy and the utilization of resources, efforts to promote clean room air conditioning system energy saving technology, in order to increase productivity, competitiveness and consumed less energy use. The current situation of clean room and energy saving technology of domestic semiconductor factory are discussed. [references 1 ~ 6] ! B (Y8, G8 X, \ 8 V General electronics factory electricity total capacity of about tens of thousands of horsepower, the equipme