LOW-ΔP-FLOW-MassFlowController,GasandLiquid详解.pdf

LOW-ΔP-FLOW Mass Flow Meters/Controllers for low pressure drop or corrosive gas service Introduction Bronkhorst High-Tech B.V., the European market leader in thermal Mass Flow Meters/Controllers and Electronic Pressure Controllers, has more than 35 years experience in designing and manufacturing precise and reliable measurement and control devices. With a wide range of instruments, Bronkhorst offers innovative solutions for many different applications in many different markets. The instruments are made to customers’ specification, in various styles, suitable for use in laboratory, industrial and hazardous areas, in such diverse applications as semiconductor and analytical installations, to name but two. LOW-ΔP-FLOW series for low pressure drop or corrosive gases In a number of applications for measuring and controlling gas flows there is only little differential pressure available and/or allowable. These are the applications for which Bronkhorst developed the Mass flow control with low differential LOW-ΔP-FLOW series, in which the flow resistance is minimised by using pressure a large bore capillary (thermal bypass sensor) in combination with a The control of mass flow with small pressure difference comprises cylindrical flow splitter (laminar flow element). Based on this concept, the LOW-ΔP-FLOW Mass Flow Controllers in compact construction mass flow capacities between 0…10 ml /min and 0…1000 m3 /h can (model series F-200/201/202). The integrated proportional, n n be measured. At a flow up to 2 l /min a pressure drop of less than 1 mbar electromagnetic control valves of these MFC’s have extremely fast n is required.