MEMS振动陀螺驱动模态稳幅特性与控制.pdf

第 17 卷第 4 期 中国惯性技术学报 Vol.17 No.4 2009 年 8 月 Journal of Chinese Inertial Technology Aug. 2009 文章编号：1005-6734(2009)04-0469-05 MEMS 振动陀螺驱动模态稳幅特性与控制 何 胜 ，王 巍 （北京航天时代光电科技有限公司，北京 100854 ） 摘要：微机电哥氏振动陀螺控制系统分析主要包括驱动模态和检测模态两个部分。对于微机电哥氏振动陀螺驱 动控制多采用类比LCR振荡电路的间接分析方法，不能精确定量的分析微机电哥氏振动陀螺驱动稳幅控制的系 统特性与控制参数，也未能明确提出微机电哥氏振动陀螺的驱动稳幅回路对象模型及其特点；针对这一问题， 采用脉冲响应函数法，推导了微机电哥氏振动陀螺的驱动稳幅回路被控对象数学模型，经过实际系统测试验证 了模型分析的准确性。在分析了该模型特点和物理本质的基础上，结合工程实践阐述微机电哥氏振动陀螺驱动 稳幅控制回路的两种实现方式，并比较了两种实现方式的优缺点。 关 键 词：微机电哥氏振动陀螺；驱动模态；对象模型；实现方法 中图分类号：U666.1 文献标志码：A System characteristics and control of drive mode in MEMS coriolis vibrating gyro HE Sheng, WANG Wei (Beijing Aerospace Times Optical-electronic Technology Co.,Ltd, Beijing 100854, China) Abstract：The analysis for the control system(CVG) of MEMS coriolis vibrating gyro includes the control of drive mode and sense mode. Many reports about the drive model control of MEMS CVG usually use the means of the analysis of the LCR oscillating circuit which can’t define the characteristics and the control parameters accurately. In order to solve this problem, a typical case of linear vibrating structure was adopted, and the control model of the MEMS CVG driven mode was deduced through unit impulse response method and was proved through circuit tests. Based on the characteristics of this kind of control system, two general realizable ways in engineering applications was introduced and compared. Key words：MEMS coriolis vibrating gyro; drive mode; control model; reali